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LINEAR MOTOR-DRIVEN LARGE XY θ STAGES
This product is also featured in the sections
"Magnetic Appliances" and " Computers & Semiconductor IC Products".

Linear Motor Stage
Linear Motor Stage
Linear Motor Control Unit
Linear Motor Control Unit

Overview
With the development of increasingly large-scale and sophisticated liquid crystal and plasma displays, demand for manufacturing equipment that is capable of high-speed, highly accurate positioning and with large-stroke specifications has grown.
The linear motor directly driven large XYQ stage developed and commercialized by Hitachi Metals satisfies this demand and lays the groundwork for next-generation processing.
Features
For a high system performance, there has to be total performance of the motor unit, which generates thrust, the motor control unit, and the stage unit, which makes possible high-accuracy operation. This fully integrated system has the following merits.
(1) High-speed, high-accuracy positioning: Because each axis is driven directly by a PM-type, direct current coreless coil motor using advanced rare-earth magnets, high-speed, high-accuracy positioning is possible even with long-stroke specifications. In addition, the system is simpler, smaller and lighter than others because it does not require a combination of coarse and delicate driving to achieve high speed without compromising accuracy.
(2) Low-noise, low-dust emission: Because stage construction does not use ball screws, a low-noise structure is possible. And because there is no rotary section, which can cause oil mist to be scattered, dust levels are also kept down.
(3) High reliability, low cost: Hitachi Metals standard linear motors are used in motor core sections with short delivery times.: Because reliability is high and parts are standardized, systems can be built very quickly and inexpensively.
(4) In the case of Hitachi Metals general-purpose motor control units, it is possible to rewrite control programs using a microcomputer. Units can be custom-built to meet a wide range of preferences, including low- to high-speed operating ranges to positioning and velocity stabilization applications.

Basic Specifications

Properties Unit Specification
Motor thrust, torque X axial N 200
   Y axial N 300
   axial N·m 50
Stroke X axial mm 1100
   Y axial    1600
   axial    5
Load    N 588
Accuracy X axial m 30
   Y axial m 30
   axial m 30
Repeatability X axial m 1
   Y axial m 1
   axial m 2
XY squareness 400 x 600 m 25
Flatness    m 40
Straightness X axis: Vertical m 10
   Horizontal m 10
   Y axis: Vertical m 10
   Horizontal m 10
Pitching X axial m 10
   Y axial m 10
Yawing X axial m 10
   Y axial m 10

Linear Motors
Inquiries
NEOMAX ENGINEERING Co.,Ltd. Sales Department
  Tel.: +81-3-5765-4301
  Inquiry Form


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