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With the development of increasingly large-scale and sophisticated
liquid crystal and plasma displays, demand for manufacturing equipment
that is capable of high-speed, highly accurate positioning and
with large-stroke specifications has grown.
The linear motor directly driven large XYQ stage developed and
commercialized by Hitachi Metals satisfies this demand and lays
the groundwork for next-generation processing.
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For a high system performance, there
has to be total performance of the motor unit, which generates thrust,
the motor control unit, and the stage unit, which makes possible
high-accuracy operation. This fully integrated system has the following
merits.
| (1) |
High-speed, high-accuracy positioning: Because
each axis is driven directly by a PM-type, direct current coreless
coil motor using advanced rare-earth magnets, high-speed, high-accuracy
positioning is possible even with long-stroke specifications.
In addition, the system is simpler, smaller and lighter than
others because it does not require a combination of coarse
and delicate driving to achieve high speed without compromising
accuracy. |
| (2) |
Low-noise, low-dust emission: Because stage
construction does not use ball screws, a low-noise structure
is possible. And because there is no rotary section, which
can cause oil mist to be scattered, dust levels are also kept
down. |
| (3) |
High reliability, low cost: Hitachi Metals standard
linear motors are used in motor core sections with short delivery
times. Because reliability is high and parts are standardized,
systems can be built very quickly and inexpensively. |
| (4) |
In the case of Hitachi Metals general-purpose
motor control units, it is possible to rewrite control programs
using a microcomputer. Units can be custom-built to meet a
wide range of preferences, including low- to high-speed operating
ranges to positioning and velocity stabilization applications. |
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axial
5
m
