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Computers & Semiconductor IC Products

MASS FLOW CONTROLLERS

SAM Aera
Mass Flow Controllers SAM,SFC1480F Series,SFC1480FX / SFC2480FX series,SFC1480G / SFC2480G series,Integrated Gas Panels Mass Flow Controllers aera,FC-R7700 series,FC-R7800 series,FC-DR980,PI-980,Transformer
Mass Flow Controllers

Overview

Aiming to improve the functionality of semiconductor production equipment, Hitachi Metals has contributed to the development of the high-technology industry by commercializing high-performance precision process fluid control equipment, drawing on the fruits of its high-level R&D.

Products Catalogs (PDF file)

Inquiries
Piping Components Division  TEL : +81-42-645-8753
Inquiry Form

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