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Computers & Semiconductor IC Products
MASS FLOW CONTROLLER & METAL DIAPHRAGM VALVES
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| Mass Flow Controllers | Metal Diaphragm Valves |
Overview
Aiming
to improve the functionality of semiconductor production equipment,
Hitachi Metals has contributed to the development of the high-technology
industry by commercializing high-performance precision process fluid
&D.
Products Catalogs (PDF file)
| Product | File Size |
|---|---|
| Compact Digital Mass Flow Controller SFC1480F Series | 388KB  |
| Mass Flow Controller SFC1480FX / SFC2480FX series | 1,850KB |
| Mass Flow Controller SFC1480G / SFC2480G series | 2,695KB |
| Integrated Gas Panels | 384KB |
| Mass Flow Controller FC-PAR78 series | |
| Mass Flow Meter FM-PAR86 series | |
| Mass Flow Controller FC-DNR78 series | |
| Mass Flow Meter FM-DNR86 series | |
| Mass Flow Controller FC-DR98 series | |
| Mass Flow Controller FC-R77 series | |
| Mass Flow Meter FM-R37 series | |
| Mass Flow Controller FC-R78 series | |
| Mass Flow Meter FM-R87 series | |
| Mass Flow Controller FC-PI98 series | |
| Vaporizer AS series | |
| Refill system RS series | |
| Pressure controller EPV100 series |
Inquiries
Piping Components Company TEL : +81-42-645-8753
Inquiry Form
Inquiry Form
