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Computers & Semiconductor IC Products
MASS FLOW CONTROLLERS
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| Mass Flow Controllers | |
Overview
Aiming to improve the functionality of semiconductor production equipment, Hitachi Metals has contributed to the development of the high-technology industry by commercializing high-performance precision process fluid control equipment, drawing on the fruits of its high-level R&D.
Products Catalogs (PDF file)
| Product | File Size |
|---|---|
| SAM® | |
| Compact Digital Mass Flow Controller SFC1480F Series | 388KB  |
| Mass Flow Controller SFC1480FX / SFC2480FX series | 1,949KB |
| Mass Flow Controller SFC1480G / SFC2480G series | 3,961KB |
| Integrated Gas Panels | 384KB |
| Aera® | |
| Mass Flow Controllers Aera® FC-R7700 series | 321KB |
| Mass Flow Controllers Aera® FC-R7800 series | 322KB |
| Digital Mass Flow Products Aera® FC-DR980 | 2,081KB |
| Mass Flow Controllers Aera® PI-980® | 672KB |
| Digital Mass Flow Products Aera® Transformer® | 2,843KB |
| Pressure controller EPV100 series | |
| Mass Flow Meter Aera® FM-R37 series | |
| Mass Flow Meter Aera® FM-R87 series | |
| Vaporizer AS series | |
| Refill system RS series |
Inquiries
Piping Components Division TEL : +81-42-645-8753
Inquiry Form
Inquiry Form
