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Computers & Semiconductor IC Products


MASS FLOW CONTROLLER & METAL DIAPHRAGM VALVES
This product is also featured in the section " Piping & Infrastructure Products."
Mass Flow Controllers Metal Diaphragm Valves
Mass flow Controllers Metal Diaphragm Bulbs

Overview
Aiming to improve the functionality of semiconductor production equipment, Hitachi Metals has contributed to the development of the high-technology industry by commercializing high-performance precision process fluid control equipment, drawing on the fruits of its high-level R&D.

Products Product
Catalog
Compact Digital Mass Flow Controller SFC1480F Series 388KB
Mass Flow Controller SFC1480FX / SFC2480FX series 1,850KB
Mass Flow Controller SFC1480G / SFC2480G series 2,695KB
Integrated Gas Panels 384KB

Inquiries
Piping Components Company
  Tel.: +81-3-5765-4275
  Inquiry Form

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