| MASS
FLOW CONTROLLER & METAL DIAPHRAGM VALVES |
| This product
is also featured in the section " Piping & Infrastructure
Products." |
| Mass Flow Controllers |
Metal Diaphragm Valves |
 |
 |
|
| Overview |
Aiming
to improve the functionality of semiconductor production equipment,
Hitachi Metals has contributed to the development of the high-technology
industry by commercializing high-performance precision process fluid
control equipment, drawing on the fruits of its high-level R&D.
|
| Products |
Product
Catalog |
| Compact Digital Mass Flow Controller SFC1480F
Series |
 388KB |
| Mass Flow Controller SFC1480FX / SFC2480FX series |
1,850KB |
| Mass Flow Controller SFC1480G / SFC2480G series |
2,695KB |
| Integrated Gas Panels |
384KB |
|
| Inquiries |
Piping Components Company
Tel.: +81-3-5765-4275
Inquiry Form |
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