Infrastructure-Related Products
Industrial Equipment

MASS FLOW CONTROLLERS

SAM
Mass Flow Controllers SAM,SFC1480F Series,SFC1480FX / SFC2480FX series,SFC1480G / SFC2480G series,Integrated Gas Panels
area
Mass Flow Controllers aera,FC-R7700 series,FC-R7800 series,FC-DR980,PI-980,Transformer

Mass Flow Controllers

Overview

Aiming to improve the functionality of semiconductor production equipment, Hitachi Metals has contributed to the development of the high-technology industry by commercializing high-performance precision process fluid control equipment, drawing on the fruits of its high-level R&D.

Products Catalogs (PDF file)

Inquiries

Sales Dep. of Fine Flow TEL : +81-3-6774-3530

Contact Information

Products

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